LabAdviser

From LabAdviser

LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel.

Contents

• Danchip contact information
• Process flow approval
• Specific Process Knowledge
  • Photolithography
  • Thin film deposition
  • Etch
  • Wafer cleaning
  • Wafer and sample drying
  • Thermal process
  • Imprinting
  • Bonding
  • Back-end processing
  • Characterization
  • E-beam lithography
  • III-V Processes
• Wafer Information
• Substrates
• New equipment in the pipeline
• Old equipment for decommissioning
• Surveys and statistics

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Danchip Contact Info

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to Danchip Customer Support.
It is our goal to answer your request regarding process flow reviews and training within 2 workdays.

• process flow review: process_flow@danchip.dtu.dk. More about process flow review here
• training on equipment and processes: training@danchip.dtu.dk
• mask order and design review: More about mask design here
  • Order only (fast track): Note! Nothing will be checked in this case. Neither mask design nor specs file.
    mask@danchip.dtu.dk (Subject: Mask Order Only). Requires a specs file like this: (example spec file).
  • Review and Order: mask@danchip.dtu.dk (Subject: Mask Review).
• metal wishes:
  • Lesker: metal@danchip.dtu.dk (Subject: Lesker Metal Wishes). - See current and future materials here: Lesker status log
  • Alcatel: metal@danchip.dtu.dk (Subject: Alcatel Metal Wishes). - See current materials here: Alcatel status log
• tool change on Polymer Injection Molding machine: toolchange@danchip.dtu.dk
• commercial offers etc. (mostly companies and external customers): sales@danchip.dtu.dk
• gas-related questions/issues (information regarding ordering, delivery, changing etc. Mostly for internal Danchip use): MechanicalWorkshop@danchip.dtu.dk
• all other inquiries or if you are in doubt: danchipsupport@danchip.dtu.dk

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